(19)
JAPANESE PATENT OFFICE
PATENT ABSTRACTS OF JAPAN
(11) Publication number 08300252 A
(43) Date of publication of application: 19 . l
(51) Int. CI
B24B 37/00
B24B 1/00
B24B 37/04
B24B 57/02
HOI L 21/304
(21) Application number: 07127391
(71) Applicant:
SONY CORP
(22) Date of filing: 28 . 04 . 95
(72) Inventor:
miyazawa YOSHIHIRO
SUZUKI TOSHIHIKO
(54) abrasive: cloth and grinding machine
AO
(57) Abstract:
PURPOSE: To provide abrasive cloth and a grinding
machine suited to this abrasive cloth, capable of
feeding abrasive surfece with grinding fluid unformly
with a required quantity neither more nor less.
CONSTITUTION: This abrasive cloth 10 consists of a
polyurethane foam grinding fluid content layer 12 of
0.5mm to 3mm in thickness, with an abrasive surface on
an upper surface, and a grinding fluid permeative base
layer 14 of 4mm in thickness. This base layer 14 is
composed of a grinding fluid permeative material in
order to feed the grinding fluid content layer 12 with
the grinding fluid after being permeated from a lower
part of the base layer 14, for example, foaming material
such as polyurethane foam or polystyrene or the like or
nonwoven fabric material. This grinding fluid
permeativeness means a property of permeating the
grinding fluid, and grinding grain size to be contained
in the grinding fluid is a range firom about 0.01 Mm to
several ^m. so that this grinding fluid permeativeness
in the base layer 14 must be grinding permeative
properties to pass through this size of grinding grain size.
COPYRIGHT: {C)1996.JPO
(mummff (J p) ^ !j^p 1^ ^ ^ (A)
iNpW¥8-300252
(43)4^110 ¥^8^(1996)11^190
(51)Inta«
B24B 37/00
1/00
37/04
57/02
HOIL 21/304
321
F I
B2 4B 37/00
1/00
37/04
57/02
HOIL 21/304 3 2 IE
iSW* ai*JaC0»6 FD 9 H) ®»MtjK<
C
A
A
(21) asmn
♦SH¥7- 127391
(7i)taiaA
000002185
(22)ffiHB
¥<K7^(1995)4^28B
SD^a/riKJfcift/ll 6 TB 7 #35^
^« ^
*^ajilMta;i| 6 TB 71135^ vr:
(72)5IW«
*^iB/ilE«ft;il6TB74K5# vr:
(54) [»Mco«»] w»ffli7DXRwese
(57) imm]
*W«ffi ^ n >^ 1 0 fi. ±^ffi(c-9FliB 1 1
t*«^$i^TV^5o WUffiSJStttfi, W«f^iSrS*S^
(0)
9
1
#ll¥8-3 0 0 2 5 2
2
ffiffi-eWSffi^PX©«f^jKil^lcg^ig?-r5m2W
[000 1]
mm^ hitmmmmimu Ht^pjNatc
[0 0 0 2]
g! 9 K^-tX 0 JfeWJg^S 4 0 Sr'ttffl LTV^So Wli^
4 2t. Iiie^«4 2^|alte^*5liltett4 4 W«
ffl ^ o ;^ G {cwe^ilr^irr •5W^tt*&/W 4 6
fcoTtt, [iIfett4 4©^t){c|Hlte;t^4 2trlHl^$-t-
oo, o ;^ G (r>±Mmmwm^^'^^ -f^&t^
[0 0 0 3] tie5l5®Wlgffl;!'c;;?.G{Ctt. ;*;SiJLT> H
10 (a) (c^-rJ;5(-, ^BlcWiiBit-^U
jKJJ i^ViJfV^O^ja^rd^fj^iSJf^O. 5nimd^e>3iiim
(o^mmm 2 1 , mmmmm 2 ^5:j$-r s?^©
o;^4t, mo (b) (C;^-t-J: 5 tc, SlO (a) ©
w^ffl c ^ 4 2 {;i'f^^T. mmmm
mm** 3 rm<JmmSLmkm 5 Sr^-f 5 WSffl ^' n ;^ 6 t
:JS*)-5o Wlg^^a^G±^;:?gT^^^fcW^g«^^, 1219
(b) tc*-rJ:5l-. W^?eetS:tSf«2X«5(caJtz, *
fc(l#*Lfc^^fl|-e[ilte^^4 2 t !J'3./NW©+i*figill
(cJ;?)W^ffil|c«*&$ti-S. cr-e, 139 (a) ttE
8(DTOia-efc9. 09 (b) t4EI9 (a) ©^I-I
[0004]
s o I w^n%^Wi.^wmmm<n> ^ ^/><d
ig^SrWS^ttS&^-^'f 7"!- J; o T±*A^ f>W«ffl ^' p ^
3
[0 0 0 5] ±j^(Dmm\m^. ^^m\t. mmm^m
[00 0 6J
[0 0 0 7] mmm^mMiz.^^'t^^muxit^^m^
0. 0 1 urn t^hWjim ^—:^m<om 30
Jo 0 0 8] ^fc. ^^m{z.^^m(Dmm^^u:^\t.
[0 0 0 91 wmm^mmmm^ii%:iffLx-<-:^M(o
[0 0 101 ^fc. *^egf->eg^M{^]SU(OWliffli!^nx
5) #0S¥8-3OO252
4
loo 1 13 weiK'^oW*iffi|a©;*:#$;jso. oi/i
[0 0 12] ±EiWSr^fig1-5fc«)t,
Wit LTV^5„
[0 0 13] :^^m<D»m^£mmmmii. mmmm^m
[0 0 14] ^^m\z^i>m(Dmmmw\t. mm
^^mm-t^mmmuxh-ox. mmmt. ±m{cmm
lJ:»^$itT0te#t*{c[HlC1-5(a]fex-p'/vi;, |hI
t, ffi!!St?WSfflj5'p;^©W«JSiagS(cg|i^i-5if2W
[0 0 15] mm^m. fsimmmmmRx^m2mm
mm^\t. mmm^mmir^:k^$^ii.^i:u mis
^'^(OmMmLOA^^iiiO. 01 i)>^Wnm Xh
5
[0 0 163
'rmmmm^^^-<-:^iSKmn^^\ x\mmmm
[0 0 1 7j m^m4\cmm<ommmm-v\t. mm^m
[0 0 181 m^mQK^mmmmx\t. m2mm
[0 0 1 9J
immmi sir. ^#giESr#Mt. mmmK&-5\^x
-rsfBEi'^. mi (a) \tm^m^mm'^>^muxM^
^ivfzm. mi ih) nmmm^mmt^^m^uxm^
:^i\.fcmxh^o ^mmmommM^t^p^i o\t. mi
(a) (;i^i-j;5(-> ±mm{mmmi i^^-r^m^
[00 2 01 1 4 It. -<-;^i 1 4 <or:^f}>h
fk^^v ^i'\y:y^<Dm^x\tyfmmxm^^tix\^
v\ mmmKt^ivmmmLoi^^ o. oin
^-t^^^mt^h^o mi (b) fc^-tWSffl^nxi 6
ti. w^ffl:^^n;^i oogfe^w-T^fcor. mmm^ms
i^TV^5r^S^^V^Ts Hi (a) {ZTr^tmm^^ u:^
1 o<om^tmzxh6o
[0 0 2 11 mmM^ti:;^<Dmmm2
m 2 \t:^^mK^mm^^n:^(ommm2<Dm^^^^
tmmmx. 1112 (a) \mmmumsmi^uxM^
^ivtcm. 112 (b) \mmm^mMi^>^miUxm^ j
V
(4) #BB¥8-3 0 0 2 5 2
6
^ivfcmxh^, 112 (a) lc^-f**JEM(OW«ffl^
^:^20\t. ^mmi<omB^^\^:^l 0, 16(D-<-
1 4 |Cft;;t.T. m(Dm^O-<-^M 2 2 ^^tx.TV^
[ 0 0 2 2 1 2 2 It, El 2 (a) |C
^i- J; 5 (c, -<-;^l 2 2 c>Tfi!l;^»>^W»*^t%«S l 2
\mmm^mBi~Mci^\z.^ -<-:^m2 2<DTm^tbw
mm^mm 1 2 -^x^-^^m 2 2 :;^fp](cw^«tt
10 *&?L 2 4 ^5^{t T fe §0 W^*g?«t*&7L 2 4 cD?L@ll. W
2 Oco¥ffi*JS:UfjE«|^£D:^-tt^^«/^^;i
^^t^^^f>^±Ltj:\^^nmci^^\^^Zht^^^WXh^o
iif-. Wli»tt$&?L2 4 0?Li^{t. iEfiltcit, ^ffll--^
:^^^flii^O. 0 1 Mm ;6^?>a;/m -efc^^^^^g;
•tSa;. 1 urn '^^^ljmUA<Di^^^XMi\^\ i^tc. W
liffitt«&?L 2 4 ft, :©-^ce^>*-e-<-;=; ji 2 2 O-^Mc
mthfc±mmmmmxt. x\t. mm^mmxh.
[0 0 2 31122 (h) \z.^i-mmm^xi:?^2 6\t. m
mm^n:^2 o<D^^mxh<>x. mmmm^m i s
^r^^S^^V^T. 02 (a) Ci^-TWUffl n >^ 2 0
[0 0 2 41 mm^^xiy^(DmMm2
30 m®iiit?. E3 (a) nmm^^mmt^^^uxm^
^kitm. gi3 (b) \wcmmm&mfi^y^im^xm^
^Mmxh^, 113 (a) K7f^ir:^mMm<D%mm^
n;^30ft. mmmi<ommm^n:;^\o^ 16(0-<-
1 4 tcftx.T. j5UO«^(0-<-;:^g3 2^^i;iTV^
6^^§rm>T. *JSMlOW«ffl^axi 0^:lnlD«
[0 0 2 51 *^iSfll<DWllffl^a:^3 0£D^-y^^3
2\z\t. ^-7sm3 2<ommf>^h^<D&mKmtmf\^
m^-t^mmmm^mi 3 4 . w«*^«^*&«dFL 3 4
40 mmmmkm 1 2 \mmm^m < fz^\mmmmi^m.
^3 Af>^t:>j^^^\^xm)3\P\\mmmw^m 1 2t.xmu
^mmm^^muz e tfi^f^^bmmmmm^wtnxh
W«ffift*&«?L3 4SUf^?L3 6 0?L^lt, iE?|(c
(;i^^ix§ W*«S»0;^^ ^ (tait 0 . 0 1 // m
jum 1 ixm f)^hlmm&(Di^
Pt. mx.\iyfmii^xm^^iix\^^m^\u^. mmm
(5)
7
^^mth^. ma 41*. mon^^u-^
[0 0 2 63 133 (b) lC*fWSffl^o;^3 814, W
igffl ^ n ;^ 3 0 oiSc^mxhcx, m^sn^mM i s *5
5rtSrK^V^T. 03 (a) t^fWllffl^ o;:^ 3 0©
[0 0 2 7J ffg^BOjlife^Jl
mi-^^mmmxh^, ^lyswown^g 5 o i4> 10
0,26 ®V^•f tvd^Sr3£S±|cS« tT»«^W«-t-S
mmmnxhox. @4[c:^i-<j;5(-, iHitett5 2t,
j£gi5-t?|H]tett5 2{c-#6tliC3iig$^i, iItef45 2©lHl
^m^^^^Mmset. mm5 6\mLx^(DTim
T^-eiiitett5 2(;iii^^nrv^5, ia^tt5 2©tts
gpiiitt, mmmw^^ e 0 ;as(Bi^ii 5 2 20
ilU ^^oHftT^-iZ/vs 4©Mg55 8(cac■5J:5l-
E 0 0 2 8 ) 36^ 5 6 -h{c§IJfe^J 1 XtiMMm 2 ©W»
ffli>a;<10, 16, 2OX^^2 6<D^^-f^^;0^^lrlfi*
L, Wig«tt*&l^6 0^^LTfF^?flESr*S&i-5t, W
Wlgffl^p;^20. 2 6©WSjS«i^?L2 6 J;>)W®jBf 30
12,18 mmmm 5 o o^mm
it. mm<Dmi^:&mm^^x. -^Mmmmm o t
[0029J mm^m(omm«2
0 5(4, :^mimmmmw<oMmm2(Dmm^^
mmmix\tmmm2(Dmm^^^:^io. i6, 2
0, 2 6©v^•f^^*^S^^t^±lcS«L■CS«SrW«1-S
w»^st?feo -c, MJt«aj 1 mmmw 5 0 5 6
r , mm 1 owa^g 5 0 <om^ t ^ zm^m^x
1 0 0 3 0 3 :^mmmmmmw 7 0 im» ^titc^m
7 2{c\t. i(Drmi^h>±mz.\Pii>^ox^m<onmiL7
4 ifi^-t£^^x^m 7 2 (D-^m^mu Lfc^ffi^^gB
i^SWfl®&®;^:#^?l4ii^0. O 1 >0^6.^;jbi f
fcSrtSr^it-rSi:, 1 /jin *^P> InmgftO;*:^ ^-C
50
WBI¥8-3 00 2 5 2
8
[ 0 0 3 1 3 y£« 7 2 ±iz.mmm i xt* hjs^j 2 ©wg
ffi^o;^10, 16, 2 0St/2 6(0^^■fi^:^l»^^|fi*
L, mmmm^Goi'ffLxmmm^mm-^t. w
^ttJSgP 5 8 RV^mmH 7 4 Sr^fr LTffgffi ^ n ;^ i
0,16 0mm^mm^<D-<-:^s 1 4 xi4w*ffl a
/^2 0, 2 6©W*jK«^?L2 4 J: t)WSJS«l 1
2, 18JCPJS1-5. W«^*7 0©aif^;^)*l4, W«
[0 0 3 23 W^ilg©gliSg!l3
WSffl ^ ct ;^ (omw 1 X(4lllfe^J 2 ©V ^-fiM^^^m
±Km^Lxms.^mm-rmmmmxhoXs mmm
1 ommmw. 5 0 ©gffi 5 6 Ki^^x. smm0.<r)Mm.
8 2*5^i;te>i^TV^5rttr^V^T, ^»Jl©WJg»
^5 0©«^^:|^Dffl[^ig|:ffi;tT^^5o *^iil»J®WS
SB 8 0 (;:Klt btifeSffi 8 2 (c(4, ^©±ffl(c|5:|=f:K
(;:;^fil 8 4 d5^(t * ©«ISI 8 4 (c:e3i1-5«^ 8
6dSfe«8 2©ffl|ffi(c«^(c^lJK$i^■rv^5.
[ 0 0 3 3 3 ^« 8 2 ±\zmMm 1 XHHJS^SJ 2 ©WH
fflj!'p;^10, 16, 2 0St^2 6©v^-fti';a^^l£«
L, mmmm^6o%:^Lxmmm^^^-r^t. m
mmmu5 8. ik^^xtma sR-amms i^mxm
m^^rJ7.lO. 1 6®W^}g3^tt©^-;^Jil 4X
(4««ffi^'o;^2 0, 2 6©W»j«tt*&7L2 4<t»)W»
12,18 mm^m s o ©gif^;^
i£(4, W«^©tt«&:;^&Srm^r, «65ls®w«sm4 o
[0 0 3 43 mmmm(ommm4
1117(4, *«M(:i#5W^^«®IIJi«^J4©^|f|!«^;^
^■rm^mmmxh?>. *iiji^j©wg^s9 0(4,
3 ©waffl o ;^ 3 0 , 3 8 ^&m±Km^ lx
mimmtmmmmxho r , gi ? (^^1-4 5
|lIfeW9 2 1, i£gSt?|5iie#9 2(>:-(^^«)(;:iiife$^^,
ISlfettg 2©llIfei:*(c-#:Wlc|@lte1-5lHl^x-://w
9 4i:, »iwiijgjtt«&gs9 6i:, ^2mmmmm9
8i:A^e>«[^$^^TV^5o « 1 9 6 (4, |h|
te$*9 2(DmB:^mcmmi9 2(D^-^.^^nmLxwi
ltf>tu-CV^5„ Ii]te7'-y'/v9 4(4, ±ffl(!:W*ffl^'a
^Sra«^-&5;fc>?)©S«9 6lr±a5l-'lix., TlaS-eiSl
teW 9 2 (C»^$^^-CV^S, m 2 Wlg«#*&i^ 9 8 (4,
^a:^3 0. 3 8 ©WS}eJ«i^«?L 3 4 (c«i!^L-CV>
[0 0 3 53 Mm9Q±\cmmm3omm^i'o:;K3
0,38 ©v^-f ^^^^^lfi«f L, ^ 1 mmmmmQ o ^
9 8SrSrWfiffli!'n;^3 0, 3 8 ©'<-;^S 3 2 ©W
(6)
8-300252
10
112, i8iciy]it5.
[00 3 6J
^Ur^^|cS«$^t.fcit*:5 1 3 {cE«©Wlgffl
^ o tCiJJg/ia:®W^iKSriS>FS* < , *>o*&-(;i«
[HI J ^mK^smmi'^^ommnimm
®, Ell (b) !iW^?S{*^Ji*57f;]^#(Ot>©-efc
[112] ^mmmmm^^^:^<DmMm2<Dm^^
CO, 02 (b) \mmm^mMf>^^u^u<Dh(D'r^h
<D, ms (b) \mmmi^m-^^^^w<oh<D'r^h
[1114 1 1 ommm
[09J 09 (a) \ms(ommmm<o^mm. 09
(b) 1^09 (a) omi-i-r^mmm-^h^o
010 (a) mmmmMmm<oi>(D. no
* [^-^o|ft?g3
1 mmm
2. 5 w
3
4, 6 %M<omm^i^^:^
10 WSffl^PXcoHJIWIl
12 mmmmM
1 4 -<-;^l
1 6 WUffl i!' n ;^ 0^»J 1 (O^mi
10 1 8 w^ie^tsjKi
20 Wllffl^n>^<D||Jfif!)2
2 2
2 4 mmmm^
2 6 Wllffl:?'n;^(Diafi^J10gfi:^M
3 0 mmK^^^(omMm3
3 2
3 4 mmmmmn
3 6 W^?g^ftm?L
3 8 W^ffl^nX(^||J6«fll3C)^^«^!l
20 4 0 m^ommmn
4 2 0^^^
4 4 m^tt
4 6
4 8
5 0 Wg^ff(D||Jg«^J
5 2 lEieW
5 4 lElfiT-:/7l^
5 6 ^ffi
30 6 0 w^Mtti&ies
7 0 mmmw:<ommm2
7 2 ^ffi
74 mm
8 0 mmmm<omMm3
8 2^^
8 4
8 6 i^SI
9 0 mmm<ommm4
9 2 iHl^W
40 94 \B\UT--'f/l^
9 6 ^l©fS?^«*&g&
9 8 fS2mmmm^
(8)
#M¥8-300 25 2
[117] [1^8]
LJ--44
(9) «fBI¥8-3 0 0 2 5 2
(51) Int. CI. « mm^ iT(^sa#-§- fi ^m^^m
HOIL 21/304 3 2 1 HOIL 21/304 3 2 IZ